Remote Plasma Source
Alternative Source
- Benchmark performance spec and function improvement
- Lower cost with longer lifetime
- Replace model type: RPS 2L/3L/6L/15L/Paragon
- RPS performance monitor
- CIP improvement for reducing CoC & Tool downtime
RPS Overhaul Process
IQC
- Test ignition Y/N
- Failure code
- Cooling water joint inspection
SOP Disassembling
Replacement Parts
- Re-coating plasma block with higher clean efficiency
- Replacing consumable electronic components
- Cooling water line cleaning
SOP Assembly
Performance Test
- He leak test
- Maximum power test
- Ignition reliability test
Features
Gold Hard Coating
Coating Performance
Coating Performance
- Higher erosion resistance
- Higher dissociation rate
- Lower process temperature
Coating Performance
Coating Performance
Coating Performance
- Uniform film thickness
- Uniform heat conduction
- Low thermal shock
5 FDCs
Coating Performance
5 FDCs
- Monitoring Anode Treatment Tank Parameters
- Ensure the stability of the inner membrane of the block